不同参数优化对ZSM-5分子筛的扫描电子显微镜图像影响

Effect of Different Parameters of Scanning Electron Microscopic Images of ZSM-5 Zeolite

  • 摘要: 扫描电子显微镜是一种常用的表征工具,可直观观察样品表面微观形貌. 由于分子筛样品中的硅铝成分而造成的二次电子产率低、耐电子束程度差、导电性不佳等特性,采用扫描电子显微镜进行形貌表征时会出现信号弱、荷电效应、表面细微结构损失等问题. 扫描电子显微镜表征时,加速电压、束斑尺寸、工作距离等是普遍的调节参数. 通过优化上述参数,对ZSM-5分子筛的扫描电子显微镜成像质量进行研究. 结果表明,低加速电压、束斑尺寸为3.0、工作距离小于5 mm时,对样品测试即可获得高质量扫描电子显微镜图像. 对比发现,镀膜后成像质量反而变差.

     

    Abstract: Scanning electron microscopy (SEM) is a common tool for the visual characterization of the microstructural morphology of the surface of samples. However, for zeolite samples, due to the low secondary electron yield, poor resistance to electron beams and bad conductivity, etc. caused by the silica and alumina components. The problems such as weak signal, charge effect, small loss of surface structure, and so on often emerge at the performance of SEM characterization of zeolite. The accelerating voltage, spot size, work distance etc. are the common adjustment parameters. By optimizing the above parameters, the SEM image quality of ZSM-5 zeolite was studies. The results showed that high quality scanning electron microscopic images can be obtained for sample testing at a low accelerating voltage, a spot size of 3.0 and a work distance of less than 5 mm. The contrast showed that the SEM images of ZSM-5 zeolite were the worst after coating platinum on the sample.

     

/

返回文章
返回