Research on Measuring Surface Roughness with Laser Confocal Microscope

The effect of experimental parameters on the measurement results, using a laser confocal microscope for the roughness measurement on the surface of different roughness standard sample blocks, was introduced. For the standard sample block, the measured surface roughness Sa met the measurement requirements (indication error≤5%), and the reasonable experimental parameters were finally determined. The method not only has the characteristics of non-contact, high resolution and fast measurement speed, but also can obtain the three-dimensional topography of the measured surface, which can more intuitive to evaluate the surface, so that the laser confocal microscope can be applied more favorably in the field of industrial materials profile analysis.