Problem and Improvement Methods of Charge Effect for Non-Conductive Samples in X-ray Photoelectron Spectroscopy Testing

The charge effect problem of non-conductive samples has a significant impact on X-ray photoelectron spectroscopy (XPS) test results, often leading to abnormal phenomena such as peak displacement, distortion, broadening, intensity attenuation, etc. Therefore, XPS researchers should pay attention to reducing the surface charge accumulation on non-conductive samples to minimise the charge effect on test results. Aiming at the charge effect problem that non-conductive samples easily generate during XPS testing, the causes were discussed based on the studies of sample selection and preparation, charge neutralization system, electrical contact, illumination. And the improvement methods of charge effect were proposed.