Electron Scanning Deep-level Transient Spectroscope (SDLTS) System and Its Applications

An electron scanning deep-level transient specstrope (SDLTS) measurement system based on a JXA-3A electron microprobe has been developed. The system consists of an electron beam induced unit, an electron beam blanking unit, a micro-movable low-temperature sample holder, a super-slow electron unit,a Boxcar averager.The system can be operated at a temperature ranging beween 80 and 450K, has resolution of about 10μp and repeatability of about 1.5%. The deep-levels and their spatial distributions of both semi-insulating ha and high resistance silicon detectors have been measured using the system and studied by comparing with the material structure defects.