Function Development of JEE-4x Vacuum Evaporator

Yu Bing, Wang Daqing. Function Development of JEE-4x Vacuum Evaporator[J]. Analysis and Testing Technology and Instruments, 1996, (2): 1-4.

Citation:

Yu Bing, Wang Daqing. Function Development of JEE-4x Vacuum Evaporator[J]. Analysis and Testing Technology and Instruments, 1996, (2): 1-4.

Citation:

Yu Bing, Wang Daqing. Function Development of JEE-4x Vacuum Evaporator[J]. Analysis and Testing Technology and Instruments, 1996, (2): 1-4.

Abstract

The JEE-4x Vacuum Evaporator is modified.The improved set can expand the original sample preparation function and save the material for evaporation.The developed is simple and easy to operate.It has the advantage of both the ion-sputtering method and the normal high vacuum plating method and can meet the requirement of SEM anlysis.

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