A Type of Simple Enclosed Heat Booster of Diffusion Pump
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Graphical Abstract
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Abstract
Introduced the development of the enclosed heat booster of diffusion pump using for TEM. The heat booster is characterized by its simplicity, convenience and lower cost. It's suitable for JEM-200CX TEM and JEE-4X Vacuum Evaporator. The application results show that it can completely take the place of the imported enclosed heat booster with original packaging.
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