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Cui Haining, Li Wei, Ren Yanzhi, Wang Dongmei, Xi Shiquan. Spectroscopic Infrared Ellipsometry and Its Application[J]. Analysis and Testing Technology and Instruments, 1998, (3): 129-137.
Citation: Cui Haining, Li Wei, Ren Yanzhi, Wang Dongmei, Xi Shiquan. Spectroscopic Infrared Ellipsometry and Its Application[J]. Analysis and Testing Technology and Instruments, 1998, (3): 129-137.
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Spectroscopic Infrared Ellipsometry and Its Application

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  • The principle, technology and developement of spectroscopic infrared ellipsometry(SIRE) are introduced. Several given application examples show that such SIRE is an effective technical method in surface and thin film measurement. It covers 29 reference papers.
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