LI Chengji, LI Yunyan, SHANG Guangyi. Scanning Tunnelling Microscope Combined with Scanning Electron Microscope[J]. Analysis and Testing Technology and Instruments, 1999, (1): 5-8.
Citation:
LI Chengji, LI Yunyan, SHANG Guangyi. Scanning Tunnelling Microscope Combined with Scanning Electron Microscope[J]. Analysis and Testing Technology and Instruments, 1999, (1): 5-8.
LI Chengji, LI Yunyan, SHANG Guangyi. Scanning Tunnelling Microscope Combined with Scanning Electron Microscope[J]. Analysis and Testing Technology and Instruments, 1999, (1): 5-8.
Citation:
LI Chengji, LI Yunyan, SHANG Guangyi. Scanning Tunnelling Microscope Combined with Scanning Electron Microscope[J]. Analysis and Testing Technology and Instruments, 1999, (1): 5-8.
Scanning Tunnelling Microscope Combined with Scanning Electron Microscope
A pocket scanning tunnelling microscope(STM) has beenbuilt on a KYKY-1000B scanning electron microscope(SEM). It consists of (1) a vibration-reduced system. (2) tunnelling tip. (3) tip scanning and approch system. (4) electric control and image acquisition system. The resolution of STM is about 1 nm. The semiconductor grating and gold film have been measured with this SEM+STM combined system.
E-alert
DownLoad: