Comparison Between the Wavelength Dispersive(WDS) and Energy Dispersive Spectrometer(EDS)

According to the qualitative analysis velocity, detection limit, accuracy of quantitative analysis, and the capability and accuracy for ultra light element analysis, WDS and EDS measurement have been taken for three kinds of super alloy and two sets of borides. The experimental results indicate the strong and weak point for both WDS and EDS, and offer a basis for the material scientists how to choose them for the special purpose.