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ZHANG Wen-de, LI Xuan, LU Min. Faults Study and it Solution of JEOL JSM-35C Scanning Microscope[J]. Analysis and Testing Technology and Instruments, 2003, (1): 53-58.
Citation: ZHANG Wen-de, LI Xuan, LU Min. Faults Study and it Solution of JEOL JSM-35C Scanning Microscope[J]. Analysis and Testing Technology and Instruments, 2003, (1): 53-58.
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Faults Study and it Solution of JEOL JSM-35C Scanning Microscope

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  • The diagram of vacuum control is introduced. Typical faults occurred are analyzed and Studied thoroughly. Ideas to resolve these faults are given.
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