Daily Maintenance and Familiar Faults Clearance of JSM-5610LV

During the daily maintenance and management of SEM, we should better control the factors of the indoor environmental and keep the interior of SEM at a high vacuum state and check the ancillary equipment whether they reach the demands or not termly. Finally, the methods of fault clearance such as halt, black screen and image show abnormality of SEM is introduced in this paper.