Operation and Maintenance of SEM & EDS

FENG Shan-e, GAO Wei-jian. Operation and Maintenance of SEM & EDS[J]. Analysis and Testing Technology and Instruments, 2014, (2): 115-117.

Citation:

FENG Shan-e, GAO Wei-jian. Operation and Maintenance of SEM & EDS[J]. Analysis and Testing Technology and Instruments, 2014, (2): 115-117.

Citation:

FENG Shan-e, GAO Wei-jian. Operation and Maintenance of SEM & EDS[J]. Analysis and Testing Technology and Instruments, 2014, (2): 115-117.

Abstract

Several preparation methods of samples for SEM were introduced as well as the points for attention during the operation, such as the selection of parameters, the handling of sum peak and escape peak, etc, are briefly described. The daily care and maintenance with examples were also discussed in this paper.

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